| 主权项 |
1. A system for the parallel testing of test sites on a sample, the system consisting of:
a. a probe station comprising a sample stage and at least two probe assemblies, wherein each probe assembly has two probe tips; b. an instrument cluster associated with each of the probe assemblies, wherein the instrument cluster consists of a power supply, current source, voltage source, waveform generator, digital multimeter, device analyzer, and switch matrix that operate to test an electrical property of a material formed on multiple site isolated regions of a sample in a high productivity combinatorial manner; c. a Personal Computer (PC) controller associated with each of the probe assemblies and its associated instrument cluster wherein hardware in the instrument cluster has additional, independent channels that are used to generate signals and pass data to the PC controller for storage and analysis; d. a master PC controller associated with one of the probe assemblies and its associated instrument cluster, and further serving to manipulate the sample stage and to synchronize the testing with the remaining PC controllers, wherein the remaining PC controllers are designated as slave PC controllers; and e. a network interconnecting the PC controllers. |
