Optical apparatus for non-contact measurement or testing of a body surface

摘要

An optical arrangement for the non-contact measurement or testing of properties of a solid's surface, such as curvature, shape, contour, roughness or alignment. An optical arrangement includes structure for establishing a gap between the solid's surface and a reference edge, structure for imaging the gap on a detector, and an analyzing system connected to the detector. The analyzing system is designed to determine gap widths lying adjacent to each other on the basis of the output signals of the detector, and to determine curvature, shape, contour or roughness of the solid's surface on the basis of the gap widths lying adjacent to each other. From the comparison of the images obtained from any two positions within a drilled hole, deductions can be made, among other things, about any tilt between the measuring object and the measuring system.

主权项

1. An optical arrangement for non-contact determination of a property of a solid's surface, comprising:
structure that establishes a gap between the solid's surface and a reference edge, wherein the reference edge is part of a gauge and defines a direction of a tangent line to the solid's surface, and the distances between the solid's surface and the reference edge, seen in the direction of a normal to the tangent line, define gap widths, structure that images the gap onto a spatially resolving detector, a light source integrated in the gauge, wherein radiation of the light source is directed at a zone of the solid's surface facing the reference edge through a focusing optical system, an analyzing system connected to the detector, configured to determine gap widths lying adjacent to each other in the direction of the tangent, on the basis of the output signals of the detector, and to determine the property of the solid's surface, on the basis of the gap widths lying adjacent to each other along the tangent.