发明名称 Tunnel field effect transistor
摘要 An FET device characterized as being an asymmetrical tunnel FET (TFET) is disclosed. The TFET includes a gate-stack, a channel region underneath the gate-stack, a first and a second junction adjoining the gate-stack and being capable for electrical continuity with the channel. The first junction and the second junction are of different conductivity types. The TFET also includes spacer formations in a manner that the spacer formation on one side of the gate-stack is thinner than on the other side.
申请公布号 US8766353(B2) 申请公布日期 2014.07.01
申请号 US201213558518 申请日期 2012.07.26
申请人 International Business Machines Corporation 发明人 Doris Bruce B.;Cheng Kangguo;Haensch Wilfried E.;Khakifirooz Ali;Lauer Isaac;Shahidi Ghavam G.
分类号 H01L29/78 主分类号 H01L29/78
代理机构 代理人 Sai-Halasz George;Percello Louis J.
主权项 1. An FET device, comprising: a gatestack having a first side and a second side; a channel region underneath said gatestack, wherein said gatestack is capable to induce a conductive channel is said channel region; a first and a second junction, adjoining said gatestack on its respective sides and being capable for electrical continuity with said conductive channel, wherein said first junction and said second junction are of different conductivity types; spacer formations over said first side and over said second side of said gatestack, wherein said spacer formation over said first side is thinner than said spacer formation over said second side; and wherein said first junction, said second junction, and said channel region are of SiGe, and wherein said FET device is characterized as being an asymmetrical tunnel FET device (TFET).
地址 Armonk NY US