Contactor including a covalent bond layer

摘要

A contactor includes a contactor base material including a first material and a conductor film including a second material. The conductor film is formed only on a contact surface with an electrode of a semiconductor apparatus at a tip of the contactor film.

主权项

1. A contactor, comprising:
a contactor base material including a first material; a conductor film formed at a contact surface of a tip of the contactor base material, the conductor film including a second material; a thin film formed between the surface of the contactor base material and the conductor film, the thin film including a third material; and a covalent bond layer formed in an interface between the conductor film and the thin film, the covalent bond layer is formed through a covalent bond of the second material and the third material, a difference between a covalent radius of the second material and a covalent radius of the third material is less than a difference between the covalent radius of the second material and a covalent radius of the first material.