Automated method for coincident alignment of a laser beam and a charged particle beam

摘要

A method and apparatus for aligning a laser beam coincident with a charged particle beam. The invention described provides a method for aligning the laser beam through the center of an objective lens and ultimately targeting the eucentric point of a multi-beam system. The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber of the charged particle system.

主权项

1. A multi-beam system, comprising:
a vacuum chamber; a workpiece support for supporting a workpiece within the vacuum chamber; a charged particle beam system for generating a beam of charged particles, said beam directed toward the workpiece; a laser beam system for generating a laser beam for processing the workpiece in the vacuum chamber; a laser beam alignment system for aligning said laser beam, said laser beam alignment system having a laser beam alignment detector in said vacuum chamber; a first beam steering controller which responds to a position signal detected by the first beam alignment detector and directs the first steering mirror to move a beam toward a first position; and a second beam steering controller which responds to a position signal detected by the second beam alignment detector and directs the second steering mirror to move the beam toward a second position wherein the first position; and wherein the first position and second position are eucentric to the workpiece.