发明名称 ALUMINUM NITRIDE SINTERED PRODUCT, METHOD FOR PRODUCING THE SAME, AND ELECTROSTATIC CHUCK INCLUDING THE SAME
摘要 A method for producing an aluminum nitride sintered product according to the present invention includes the steps of (a) preparing a powder mixture that contains AlN, 2 to 10 parts by weight of Eu 2 O 3 with respect to 100 parts by weight of AlN, Al 2 O 3 such that a molar ratio of Al 2 O 3 to Eu 2 O 3 is 2 to 10, and TiO 2 such that a molar ratio of TiO 2 to Al 2 O 3 is 0.05 to 1.2, but not Sm; (b) producing a compact from the powder mixture; and (c) firing the compact by subjecting the compact to hot-press firing in a vacuum or in an inert atmosphere.
申请公布号 KR101413250(B1) 申请公布日期 2014.06.30
申请号 KR20090112635 申请日期 2009.11.20
申请人 发明人
分类号 C04B35/581;C04B35/645;H01L21/68 主分类号 C04B35/581
代理机构 代理人
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