CAPACITY ELEMENT, CAPACITY ARRAY, AND A/D CONVERTER

摘要

PROBLEM TO BE SOLVED: To be capable of uniformly forming a capacity element and accurately forming a capacity DAC (capacity array) used inside an A/D converter, for instance.SOLUTION: The capacity element includes a first electrode NA and a second electrode NB respectively having a closed loop shape, alternately disposed concentrically in at least one wiring layer METAL2, METAL3 provided on a substrate 1. Thus, influence of loss that may occur at a terminal part of a capacity electrode may be removed and uniformly forming a capacity element becomes possible.