| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a plasma generator capable of effectively suppressing ozone generation by simple structure.SOLUTION: A plasma generator comprises a pair of opposite electrodes, and in which predetermined voltage is applied between the electrodes to cause plasma arc, the pair of electrodes have: a pair of conductor substrates; and a dielectric film formed at least one of opposite surfaces of the conductor substrates, fluid circulation holes are provided, respectively, at corresponding parts of the pair of electrodes, constituted so that the fluid circulation holes are penetrated, and 30% or more of the entire surface area of the dielectric film is covered with an ozone remover.</p> |
