| 摘要 |
PROBLEM TO BE SOLVED: To provide a management device of backup pin for managing at which position on a table the backup pin is arranged appropriately.SOLUTION: After creating an action list in accordance with the arrangement position of backup pins, a controller 20 acquires the target position coordinates (1, 1) of list number (1). Thereafter, the controller 20 controls a substrate recognition camera 4 to move and to be located above a target position based on the target position coordinates (1, 1). Thereafter, the image of a backup table 7 at the target position coordinates is picked up, a backup pin 2 is detected (pin detection mode) from an image thus captured, and the backup pin 2 is detected (insertion hole detection mode). On the basis of the existence result of the backup pin 2 and the existence result of the insertion hole 7H, the controller 20 determines whether or not both results match, and if they match, the controller 20 controls to update the arrangement position data of the backup pins 2. |
