发明名称 LIGHT BEAM INCIDENT DEVICE AND REFLECTED LIGHT MEASURING APPARATUS
摘要 PROBLEM TO BE SOLVED: To easily vary the incident angle of light to a sample.SOLUTION: A light beam incident device 10 includes: an off-axis parabolic mirror 14a that receives collimated light beams La1 and La2 and converges the collimated light beams La1 and La2 to one point 1a of a measuring object 1; and an incident-side light receiving surface 12a of the mirror 12 for sending the collimated light beams La1 and La2 to the off-axis parabolic mirror 14a. In accordance with the light receiving part in which the off-axis parabolic mirror 14a receives the collimated light beams La1 and La2, the angles (incident angles &thetas;a1 and &thetas;a2) between the measuring object 1 and convergence light beams Fa1 and Fa2 produced by the convergence of the collimated light beams La1 and La2 vary. The incident-side light receiving surface 12a of the mirror 12 can vary the light receiving part by moving with respect to the off-axis parabolic mirror 14a.
申请公布号 JP2014119448(A) 申请公布日期 2014.06.30
申请号 JP20130193742 申请日期 2013.09.19
申请人 ADVANTEST CORP 发明人 YAMASHITA TOMOTAKE;IRISAWA AKIYOSHI
分类号 G01N21/3581 主分类号 G01N21/3581
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