| 摘要 |
PROBLEM TO BE SOLVED: To appropriately control the temperature of a dry pump with a simple configuration.SOLUTION: A dry vacuum pump device 100 comprises: a dry pump 110; a motor 120 for driving the dry pump 110; and an inverter device 130 for supplying power to the motor 120. In addition, the dry vacuum pump device 100 comprises: a cooling liquid flow passage 140 through which cooling liquid is passed to cool the dry pump 110, the motor 120, and the inverter device 130; and a solenoid valve 150 provided in the cooling liquid flow passage 140. In addition, the dry vacuum pump device 100 comprises: a control panel 160 for controlling the flow rate of the cooling liquid by controlling the opening of the solenoid valve 150 depending on the power value outputted from the inverter device 130. |
