PROBE CARD, INSPECTION APPARATUS AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a probe card, an inspection apparatus and an inspection method that are capable of efficiently performing inspection.SOLUTION: A probe card repeatedly performing touchdown to inspect a wafer 12 having plural devices 125, includes: a probe substrate 40; a first probe group 141 having plural contactors 14a aligned on the probe substrate 40; and second probe groups 142a and 142b having plural contactors 14b of which tip positions are closer to the probe substrate 40 compared with the contactors 14a, the second probe groups arranged separately so as to sandwich the first probe group 141 therebetween in a plan view of the probe substrate 40.