QUANTITATIVE ANALYSIS METHOD FOR MEASUREMENT TARGET ELEMENT IN SPECIMEN USING LASER-INDUCED PLASMA SPECTRUM

摘要

PROBLEM TO BE SOLVED: To provide a method which is capable of calculating the intensity of a laser-induced plasma spectrum even when peaks of the spectrum very closely overlap each other in laser-induced plasma spectroscopy, and is capable of searching for a peak having excellent precision and reproducibility when an analysis target element has a high concentration.SOLUTION: A quantitative analysis method for a measurement target element in a specimen using laser-induced plasma spectrum includes: irradiating a specimen containing a measurement target element with a laser beam to generate plasma; obtaining an optical spectrum generated from the plasma; obtaining a fitting curve in an area where at least one measurement target peak is excluded, in the optical spectrum; separating and obtaining a measurement target peak curve including at least one measurement target peak, by excluding the fitting curve in the optical spectrum; calculating peak intensities at specific wavelengths selected on the fitting curve and the measurement target peak curve; and obtaining a composition ratio of the measurement target element on the basis of a ratio of peak intensities at the specific wavelengths selected on each curve.