发明名称 ANALYSIS METHOD, ANALYZER, AND PROGRAM
摘要 <p>PROBLEM TO BE SOLVED: To efficiently, accurately, and in an extremely short time, perform precision structural analysis by an electron diffraction image, using a calculation of frozen lattice approximation in a Bethe method, which is conventionally difficult to be calculated.SOLUTION: The calculation of frozen lattice approximation in which the effect of inelastic scattering by thermal vibration of atoms is used approximately is performed in a Bethe method. At this time, the crystal potential is divided into a first potential based on the thermal equilibrium position of the atoms and a second potential based on the displacement by the thermal vibration of the atoms, and is calculated, a wave function is calculated using the first potential and second potential, and an electron diffraction image is acquired by the calculation based on the wave function.</p>
申请公布号 JP2014119434(A) 申请公布日期 2014.06.30
申请号 JP20120277268 申请日期 2012.12.19
申请人 FUJITSU LTD 发明人 YAMAZAKI TAKASHI
分类号 G01N23/20;H01J37/22;H01J37/26 主分类号 G01N23/20
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