发明名称 WORKPEICE CENTERING UNIT AND METHOD FOR CINTERING WORKPIECE USING THE SAME
摘要 Disclosed are a workpiece centering unit and a method for centering a workpiece using the same to reduce time for a centering operation and to enable an accurate centering operation. According to an embodiment of the present invention, the workpiece centering unit comprises a support; and a centering gauge disposed on the top of the support. The centering gauge comprises a support guide at both ends of a workpiece; an upper sensor engaged with the top of the support guide; and a lower sensor which is disposed to face the upper sensor and which is engaged with the bottom of the support guide.
申请公布号 KR20140079946(A) 申请公布日期 2014.06.30
申请号 KR20120149177 申请日期 2012.12.20
申请人 LG SILTRON INCORPORATED 发明人 MOON, CHUL KYU;LEE, SANG JUN;PARK, SEONG WOOK
分类号 H01L21/304;B24B37/04;H01L21/68 主分类号 H01L21/304
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