| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor with a built-in amplifier, which can properly detect a differential pressure between fluid and a space in which a pipe is installed, while an amplifier circuit of a pressure signal is protected from the heat of the fluid.SOLUTION: A pressure sensor 1 with a built-in amplifier includes: a pressure detecting element 3 outputting a pressure signal after detecting a differential pressure between fluid and a space in which a pipe including a flow channel of the fluid is installed; an amplifier circuit board 5 having an amplifier circuit 5a which amplifies the pressure signal; a housing 2 to which the pressure detecting element 3 is fixed; and a separation part 4 which is fixed to the housing 2 and which separates a first space R1 including the pressure detecting element 3 and a second space R2 including the amplifier circuit board 5. The housing 2 includes an inlet 7 letting a cooling gas cooling the amplifier circuit board 5 flow into the second space R2, and an outlet 8 allowing the cooling gas to be discharged from the second space R2. |
