UPPER ELECTRODE OF DRY ETCHING REACTION CHAMBER AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide an upper electrode of a dry etching reaction chamber which allows for prolongation of use-life by enhancing the etching resistance thereof, and to provide a manufacturing method therefor.SOLUTION: An upper electrode of a dry etching reaction chamber including a plate and at least one gas inlet unit, and a manufacturing method therefor are provided. The plate includes at least one through hole. The gas inlet unit is fitted in the through hole, and includes a plurality of gas holes. When the gas hole is made in the gas inlet unit of the upper electrode of a dry etching reaction chamber, destruction of the plate is reduced and the use-life of the upper electrode is prolonged. A manufacturing method therefor is also provided.