发明名称 EVAPORATION APPARATUS AND METHOD OF FABRICATING ORGANIC MATERIAL PATTERN USING THE SAME
摘要 The present invention provides an evaporation apparatus which includes a chamber on which a substrate is loaded; a heat source which is arranged in the chamber and supplies heat energy; and a region setting member which is arranged between the heat source and the substrate and selectively transmits the heat energy supplied from the heat source. The substrate includes a non-condensation region to which the heat energy is transmitted by the region setting member and a condensation region which blocks the heat energy by the region setting member.
申请公布号 KR20140080004(A) 申请公布日期 2014.06.30
申请号 KR20120149305 申请日期 2012.12.20
申请人 LG DISPLAY CO., LTD. 发明人 BAIK, SEUNG MIN;KIM, HO JIN
分类号 H01L51/56;H05B33/10 主分类号 H01L51/56
代理机构 代理人
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