发明名称 |
EVAPORATION APPARATUS AND METHOD OF FABRICATING ORGANIC MATERIAL PATTERN USING THE SAME |
摘要 |
The present invention provides an evaporation apparatus which includes a chamber on which a substrate is loaded; a heat source which is arranged in the chamber and supplies heat energy; and a region setting member which is arranged between the heat source and the substrate and selectively transmits the heat energy supplied from the heat source. The substrate includes a non-condensation region to which the heat energy is transmitted by the region setting member and a condensation region which blocks the heat energy by the region setting member. |
申请公布号 |
KR20140080004(A) |
申请公布日期 |
2014.06.30 |
申请号 |
KR20120149305 |
申请日期 |
2012.12.20 |
申请人 |
LG DISPLAY CO., LTD. |
发明人 |
BAIK, SEUNG MIN;KIM, HO JIN |
分类号 |
H01L51/56;H05B33/10 |
主分类号 |
H01L51/56 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|