发明名称 WIRE BONDING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a wire bonding method capable of reducing occurrence of failures of semiconductor element.SOLUTION: A first electrode pad 21 on a first semiconductor element 2 is subjected to ball bonding. A second electrode pad 31 on a second semiconductor element 3 is stitch bonded onto a bump 13. Since a capillary 10 is not pressed directly to the first electrode pad 21 nor the second electrode pad 31, occurrence of failures in the first semiconductor element 2 and second semiconductor element 3 can be reduced.
申请公布号 JP2014120702(A) 申请公布日期 2014.06.30
申请号 JP20120276637 申请日期 2012.12.19
申请人 AZBIL CORP 发明人 SUETAKA SATOSHI
分类号 H01L21/60 主分类号 H01L21/60
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