发明名称 COAT TUB AND DIP COATER
摘要 PROBLEM TO BE SOLVED: To suppress deterioration of coating liquid in a dip coating and form a film having constant quality with excellent reproductivity.SOLUTION: On a surface of a substrate 11, a coat 22 which serves as a reflection prevention film is formed from coating liquid 21 by a dip coater 20. A coat tub 27 of the dip coater 20 comprises a tub body 36 and a lid 37. The tub body 36 stores the coating liquid 21. The lid 37 is disposed on an upper part of the tub body 36 and covers a liquid surface 21s of the coating liquid 21. On the lid 37, an opening 37a is provided. Through the opening 37a, the substrate 11 in a vertical attitude is lifted up and down to be put in and taken out from the tub body 36. An end 37b of the opening 37a side of the lid 37 extends toward the liquid surface 21s side.
申请公布号 JP2014117634(A) 申请公布日期 2014.06.30
申请号 JP20120272743 申请日期 2012.12.13
申请人 JCU CORP 发明人 KUMAGAI SHINGO;NABESHIMA MITSUHIRO;HORIE KUNIAKI
分类号 B05C3/09;B05C9/08 主分类号 B05C3/09
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