| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electromagnetic lens and an electron beam exposure device, capable of generating a desired magnetic field without an increased heating value if an external diameter is reduced.SOLUTION: In an electromagnetic lens, having an electromagnetic coil 3 wound in rotational symmetry relative to the optical axis of an electron beam and a pole piece 2 covering the electromagnetic coil 3, a gap 2a is integrally formed at one or the boundary part of both an inner peripheral wall 2b, formed at the inner peripheral side of the pole piece 2, and a lower end wall 2d formed on the end part of the electron beam on the output side. The inner peripheral wall 2b is formed thinnest at a part near the gap 2a, with a gradually larger thickness as becoming apart from the gap 2a. Further, according to a varied thickness of the inner peripheral wall 2b, the width of the electromagnetic lens 3 in the radial direction is formed larger as becoming nearer the gap 2a.</p> |
