PHYSICAL QUANTITY DETECTION SENSOR, PHYSICAL QUANTITY DETECTION DEVICE, ELECTRONIC APPARATUS, AND MOVABLE BODY

摘要

PROBLEM TO BE SOLVED: To provide a physical quantity detection sensor capable of maintaining high sensitivity performance.SOLUTION: A physical quantity detection sensor 20 includes: a fixing part 211 as a base part; a plate-shaped movable part 212 having a main surface 212c; a joint part 213 which connects the fixing part 211 and the movable part 212 and enables the movable part 212 to displace in a direction crossing the main surface 212c in response to a physical quantity applied in the direction crossing the main surface 212c; and a pressure sensitive element 22 which is connected to the fixing part 211 and the movable part 212 and disposed so as to straddle the joint part 213. A width B of the joint part 213 is in the range of 50% or more and 98.5% or less of a width A of the movable part 212 as viewed in plan view from a direction perpendicular to the main surface 212c.