IMPLANTED-ION ASSISTED GROWTH METHOD OF METAL OXIDE NANOWIRE AND PATTENING DEVICE USING THE METHOD

摘要

According to one aspect of the present invention, provided is a method for growing metal oxide nanowire by injecting ions. The method includes a thin film deposition step of depositing a metal oxide thin film on a substrate, an ion injection step of injecting ions into the metal oxide thin film, and a heating step of growing the metal oxide thin film by heating the metal oxide thin film containing the ions.