发明名称 APPARATUS FOR TRANSERRING SUBSTRATE
摘要 Disclosed is a substrate transfer apparatus including: a substrate transfer part arranged at one side of an apparatus frame and transferring a substrate; a substrate storing unit arranged in the rear end of the substrate transfer part along the transfer direction of the substrate, and storing the substrate in a basket; and a substrate rotating unit which rotates the substrate clockwise or counterclockwise by the transfer state of the substrate transferred through the substrate transfer part so that the substrate faces one direction and is delivered to the substrate storing unit.
申请公布号 KR20140079650(A) 申请公布日期 2014.06.27
申请号 KR20120148510 申请日期 2012.12.18
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD.;DSENT CO., LTD. 发明人 KIM, YOUNG TAE;CHOI, BYUNG SOO
分类号 H05K13/02;B65G49/06 主分类号 H05K13/02
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