发明名称 IMPROVEMENT OF REVERSE RECOVERY USING OXYGEN-VACANCY DEFECTS
摘要 A semiconductor device comprises a semiconductor substrate, a first electrode formed on a first main surface of the semiconductor substrate, and a second electrode formed on a second main surface of the semiconductor substrate. The semiconductor substrate includes a first region in which a density of oxygen-vacancy defects is greater than a density of vacancy cluster defects, and a second region in which the density of vacancy cluster defects is greater than the density of oxygen-vacancy defects.
申请公布号 US2014179116(A1) 申请公布日期 2014.06.26
申请号 US201414193434 申请日期 2014.02.28
申请人 MISUMI TADASHI;IWASAKI SHINYA;SUGIYAMA TAKAHIDE 发明人 MISUMI TADASHI;IWASAKI SHINYA;SUGIYAMA TAKAHIDE
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
主权项
地址 NISSHIN-SHI JP