发明名称 SAWING DEVICE
摘要 The present invention relates to a cutting device. The cutting device, according to the present invention, comprises: an absorption unit which fixes a substrate by adsorbing and enables a linear reciprocating movement and a rotational movement; a cutting unit for cutting the substrate into individual units along a cutting path by being provided to enable up and down movement relative to the adsorption unit; a main pneumatic unit for providing air pressure to the adsorption unit to adsorb the substrate when a normal power supply is provided; a secondary pneumatic unit for providing air pressure to the adsorption unit when the power supply is abnormally terminated and a substrate is provided to the adsorption unit; and a recognition storage unit for recognizing a position of the cutting unit on the cutting path in real-time to store the position information and the cutting path.
申请公布号 KR20140078820(A) 申请公布日期 2014.06.26
申请号 KR20120147958 申请日期 2012.12.18
申请人 HANMISEMICONDUCTOR CO., LTD. 发明人 BANG, HYO YOUNG
分类号 H01L21/301;H01L21/78 主分类号 H01L21/301
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