| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray device that makes it easy to align the position of an X-ray optical system with respect to a fine focus X-ray source.SOLUTION: The X-ray device comprises: an electron beam source 2 that emits an electron beam 3; a target 4 to which the electronic beam 3 is guided and on which a focus spot 5 is formed; an X-ray optical system 6 that collects an X-ray emitted from the focus spot 5 and forms an X-ray beam 8; and a sample position 9 to which the X-ray beam 8 is guided. The X-ray device further comprises an electrostatic or magnetic electron beam deflection device 10 that is suitable for moving the focus spot 5 on the target 4, and furthermore, in any of x, y and z-directions, a spread of the focus spot 5 is at least one/F of a spread of the target 4, and a magnification F is equal to 1.5. |
