| 摘要 |
PROBLEM TO BE SOLVED: To provide a static pressure fluid guide device capable of reducing power consumption at the time of linear motion of a movable body to a support body, and capable of enhancing attenuation performance to vibration.SOLUTION: In a static pressure fluid guide device 50, an attenuation mechanism 54 is provided, and in the attenuation mechanism 54, oil is supplied with hydrostatic pressure due to natural drop, without performing pressurized supply. Consequently, lowering of oil pressure in a static pressure fluid guide mechanism 53a can be suppressed, and rigidity to load support at the time of linear motion of a movable body 52a is set to an approximate design value to position the movable body 52a with high accuracy. |
