ALIGNMENT DEVICE, ALIGNING METHOD AND LAMINATE SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To solve the problem in which connection parts are not aligned properly.SOLUTION: An alignment device for aligning a first member and a second member includes: an acquiring section for acquiring position relation information related to a structure actual measurement position which is an actual measurement position of a structure provided on the first member, a mark actual measurement position which is an actual measurement position of an alignment mark arranged on the first member and used for alignment with the second member, and a structure design position which is a design position of the structure; and an aligning section for aligning the first member and the second member using the acquired position relation information, the position of the alignment mark of the first member and the position of the alignment mark of the second member. The aligning section aligns the first member and the second member so that the structure overlaps a predetermined position of the second member.