发明名称 |
SEMICONDUCTOR WAFER, SEMICONDUCTOR LIGHT-EMITTING DEVICE, OPTICAL TRANSMISSION DEVICE, INFORMATION PROCESSING DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR LIGHT-EMITTING ELEMENT |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor wafer capable of improving a manufacturing yield of a surface-emitting semiconductor laser.SOLUTION: A plurality of element formation regions 10 are formed in a wafer 100 in which a plurality of surface-emitting semiconductor laser elements are formed. A VCSEL20 and an electrode pad 50 for driving this VCSEL20 are formed in the element formation regions 10. An annular hydrophobization region 30 in which a surface of an interlayer insulating film is hydrophobized is formed around the VSCEL20, and an annular groove 40 is formed outside the VCSEL20. A resin 70 is potted in the element formation regions 10 so as to cover the VCSEL20. |
申请公布号 |
JP2014116417(A) |
申请公布日期 |
2014.06.26 |
申请号 |
JP20120268560 |
申请日期 |
2012.12.07 |
申请人 |
FUJI XEROX CO LTD |
发明人 |
MURAKAMI AKEMI;KONDO TAKASHI;MATSUSHITA KAZUMASA;OZAWA HIDEAKI;TAKEDA KAZUTAKA;NAKAYAMA HIDEO |
分类号 |
H01S5/02;B41J2/44;G02B6/42;H01S5/183 |
主分类号 |
H01S5/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|