发明名称 SEMICONDUCTOR WAFER, SEMICONDUCTOR LIGHT-EMITTING DEVICE, OPTICAL TRANSMISSION DEVICE, INFORMATION PROCESSING DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR LIGHT-EMITTING ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor wafer capable of improving a manufacturing yield of a surface-emitting semiconductor laser.SOLUTION: A plurality of element formation regions 10 are formed in a wafer 100 in which a plurality of surface-emitting semiconductor laser elements are formed. A VCSEL20 and an electrode pad 50 for driving this VCSEL20 are formed in the element formation regions 10. An annular hydrophobization region 30 in which a surface of an interlayer insulating film is hydrophobized is formed around the VSCEL20, and an annular groove 40 is formed outside the VCSEL20. A resin 70 is potted in the element formation regions 10 so as to cover the VCSEL20.
申请公布号 JP2014116417(A) 申请公布日期 2014.06.26
申请号 JP20120268560 申请日期 2012.12.07
申请人 FUJI XEROX CO LTD 发明人 MURAKAMI AKEMI;KONDO TAKASHI;MATSUSHITA KAZUMASA;OZAWA HIDEAKI;TAKEDA KAZUTAKA;NAKAYAMA HIDEO
分类号 H01S5/02;B41J2/44;G02B6/42;H01S5/183 主分类号 H01S5/02
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