| 摘要 |
A magnetic sensing device and a magnetic sensing method therefor. The device comprises a magnetic sensing component in a third direction. The sensing devices of the X-axis, the Y-axis and the Z-axis are arranged on the same wafer or chip by the magnetic sensing device, so that magnetic field signals in the directions of the X-axis, the Y-axis and the Z-axis can be independently measured. The magnetic sensing component in the third direction comprises: a base (10), and at least one pair of magnetic sensing modules (101, 102, 103, 104) which are mated with each other, the surface of the base (10) being provided with a trench (11).Each of the magnetic sensing modules (101, 102, 103, 104) comprises a magnetic conduction unit (20) and a sensing unit. The magnetic conduction unit (20) is used for collecting a magnetic signal in the third direction and outputting same; and the sensing unit is arranged on the surface of the base (10) to receive the magnetic signal in the third direction outputted by the magnetic conduction unit (20), and measure the magnetic field intensity corresponding to the third direction according to the magnetic signal. After the arrangement of each pair of magnetic sensing modules (101, 102, 103, 104) which are mated with each other, the output of the magnetic field signals of each pair of magnetic sensing modules (101, 102, 103, 104) in the first direction and the second direction can be directly offset. |
