发明名称 SEALING DEVICE, AND SEALING TRAY
摘要 PROBLEM TO BE SOLVED: To provide a sealing device in which a space between two sealing plates can be made a vacuum atmosphere easily and surely.SOLUTION: A first sealing plate 31 is mounted on a base plate 11 of a sealing tray 2a, and a second sealing plate 32 is arranged at an elastic member 16 provided at mounting rails 15, 15that are movably provided at the base plate 11. A cyclic sealing material 36 is arranged on the first sealing plate 31, a spacer 37 is arranged in an inside thereof, a weight 38 suspended by a suspending part 22 is mounted on the first sealing plate 31 in a vacuum atmosphere, and a sealing material 36 that is heated to be softened is pressing-forced by weight of the weight 38 to be deformed to make the second sealing plate 32 contact with the spacer 37. In this condition, a region surrounded by the sealing material 36 is made a vacuum atmosphere, slow cooling is performed and solidification is performed in a condition in which the weight 38 is mounted on the second sealing plate 32, and thereby a laminate in which a space between the first and second sealing plates 31, 32 is made a vacuum atmosphere is obtained.
申请公布号 JP2014114188(A) 申请公布日期 2014.06.26
申请号 JP20120270519 申请日期 2012.12.11
申请人 ULVAC JAPAN LTD 发明人 HOSODA IKUO;NAGASHIMA MASAHIRO;AKAZAWA KENSUKE;OMORI MIKI;KUBO MASASHI
分类号 C03C27/06 主分类号 C03C27/06
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