LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, PIEZOELECTRIC ELEMENT, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT

摘要

A flow channel substrate has pressure chambers, and the pressure chambers communicate with nozzle openings for ejecting liquid. Each of piezoelectric elements on the flow channel substrate has a piezoelectric layer, a pair of electrodes, and a wiring layer coupled to the electrodes. The wiring layer has an adhesion layer and a conductive layer on the adhesion layer. The adhesion layer contains at least one selected from nickel, chromium, titanium, and tungsten. The piezoelectric element has an insulating film at least between the wiring layer and the electrodes. The wiring layer and the electrodes of the piezoelectric element are coupled via contact holes created through the insulating film.

主权项

1. A liquid ejecting head comprising:
a flow channel substrate, the flow channel substrate having a pressure chamber communicating with a nozzle opening for ejecting liquid; and a piezoelectric element, the piezoelectric element provided to the flow channel substrate and having a piezoelectric layer, a pair of electrodes, and a wiring layer coupled to the electrodes, the wiring layer having an adhesion layer and a conductive layer on the adhesion layer, the adhesion layer containing at least one selected from nickel, chromium, titanium, and tungsten, wherein: the piezoelectric element has an insulating film at least between the wiring layer and the electrodes; and the wiring layer and each of the electrodes of the piezoelectric element are coupled via a contact hole created through the insulating film.