ARC EXTINGUISHING METHOD AND POWER SUPPLY SYSTEM HAVING A POWER CONVERTER

摘要

An arc extinguishing method for extinguishing arcs in a plasma chamber (6) of a plasma system (1), comprising the method steps of: a. producing power during a plasma operation for producing plasma in said plasma chamber and for carrying out a plasma-processing process using the produced plasma, in which a digital-to-analog converter (DAC) (41) generates an analog signal that is supplied to an amplifier path (31, 32) and amplified there; b. monitoring the plasma system with regard to the presence of an arc by means of arc identification; c. if an arc is identified in step b. : controlling the DAC by the arc identification in such a way that an analog output signal of the DAC is modified.