发明名称 |
VACUUM ULTRAVIOLET PHOTON SOURCE, IONIZATION APPARATUS, AND RELATED METHODS |
摘要 |
<p>A vacuum ultraviolet (VUV) photon source includes a body, a VUV window, electrodes disposed on the body outside an interior thereof, and a dielectric barrier between the electrodes. A method for generating VUV photons includes generating a dielectric barrier discharge (DBD) in an interior of a photon source by applying a periodic voltage between a first electrode and a second electrode separated by a dielectric barrier, wherein the DBD produces excimers from a gas in a gap between the electrodes, and transmitting VUV photons through a window of the photon source.</p> |
申请公布号 |
WO2014099185(A1) |
申请公布日期 |
2014.06.26 |
申请号 |
WO2013US69720 |
申请日期 |
2013.11.12 |
申请人 |
AGILENT TECHNOLOGIES, INC. |
发明人 |
PERELMAN, GERSHON;GOLDBERG, NOAH;HANSEN, STUART, C. |
分类号 |
H01J65/04;G01J3/10 |
主分类号 |
H01J65/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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