| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a technology for observing a specimen surface on which an insulative region and a conductive region are formed with high contrast and facilitating detection of a missing defect or an opening defect and classification of a defect type.SOLUTION: An image is captured under a condition where luminance in a conductive region is higher than luminance in an insulative region, an image is captured under a condition where the luminance in the insulative region is higher than the luminance in the conductive region, and on the basis of the images, both a missing defect and an opening defect on a specimen surface are detected with high accuracy. A specimen observation method includes the steps of: irradiating the specimen surface including the insulative region and the conductive region with an imaging electron beam of irradiation energy (LE) to maximize material contrast (S203); capturing an image from the specimen surface irradiated with the imaging electron beam under the condition where the luminance in the conductive region is higher than the luminance in the insulative region (S205); and capturing an image under the condition where the luminance in the insulative region is higher than the luminance in the conductive region (S207).</p> |
