Circuits and Methods for Processing Signals Generated by a Circular Vertical Hall (CVH) Sensing Element in the Presence of a Multi-Pole Magnet

摘要

A magnetic field sensor has a circular vertical Hall (CVH) sensing element with a plurality of vertical Hall elements disposed over a common implant region in a substrate. The plurality of vertical Hall elements is disposed in an x-y plane. The magnetic field sensor is responsive to a magnetic field generated by a multi-pole magnet having a plurality of north poles and also a plurality of south poles arranged in a plane parallel to the x-y plane, and, in some embodiments, arranged in the x-y plane. A corresponding method is also described.

主权项

1. A magnetic field sensor, comprising:
a semiconductor substrate having a first surface in an x-y plane; and a CVH sensing element comprised of a plurality of vertical Hall elements, wherein each one of the plurality of vertical Hall elements is arranged upon a common circular implant region in the first surface of the semiconductor substrate, wherein the plurality of vertical Hall elements is configured to generate a plurality of x-y output signals responsive to a magnetic field having a direction component parallel to the x-y plane, wherein the CVH sensing element is configured to generate a CVH output signal comprised of the plurality of x-y output signals, wherein the magnetic field results from a multi-pole magnet having a plurality of north poles and a plurality of south poles, each disposed in a plane parallel to the x-y plane, each north pole proximate to at least one south pole.