LITHOGRAPHIC APPARATUS AND TABLE FOR USE IN SUCH AN APPARATUS

摘要

A table (WT) for use in an immersion lithographic apparatus, the table comprising: a first planar surface (112); and a swap bridge member (150) defining an upper surface (152) which extends from and is substantially co-planar with the first planar surface; wherein the swap bridge member is configured to deform when the swap bridge member collides with another object, while remaining attached to the table.