发明名称 TERAHERTZ WAVE MEASUREMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To reduce an influence arising from a tilt of a retroreflection mirror as to analysis accuracy of characteristics of a measured object employing a terahertz wave.SOLUTION: A terahertz wave measurement device (100) comprises: generation means (110) that is irradiated with first laser light (LB1) to thereby generate a terahertz wave (THz); and retro-reflection means (120) that retro-reflects the first laser light. Detection means has direction dependency in which a tolerance of a position displacement along a first direction (Z1) of an irradiation position of second laser light is larger than a tolerance of a position displacement along a second direction (Y1) of the irradiation position of the second laser light. While a tilt of the retro-reflection means along a third direction (Z2) makes the retro-reflection of the retro-reflection means unperformable, the retro-reflection means has direction dependency in which the retro-reflection is performable even if the tilt of the retro-reflection means along a fourth direction (Y2) is generated, and the first direction (Z1) and the third direction (Z2) are aligned.
申请公布号 JP2014115189(A) 申请公布日期 2014.06.26
申请号 JP20120269473 申请日期 2012.12.10
申请人 PIONEER ELECTRONIC CORP 发明人 NAKANO MASAHARU;KOBAYASHI HIDEKI;YAMAGUCHI ATSUSHI;MIURA MASAHIRO
分类号 G01N21/35 主分类号 G01N21/35
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