Dissolution Rate Monitor

摘要

A multiple channel site-isolated reactor system and method are described. The system contains a reactor block with a plurality of reactors. Input lines are coupled to each reactor to provide a fluid to the respective reactors. A sealing element associated with each reactor contacts a surface of a substrate disposed below the reactor block, which defines isolated regions on the surface of the substrate. A dissolution rate monitor extends into each reactor to monitor a rate of real-time dissolution of one or more layers on the surface of the substrate when it is disposed proximate to the surface of the substrate.

主权项

1. A multiple channel site-isolated reactor system, comprising:
a plurality of reactors; one or more fluid input lines accessing a first end of each of the plurality of reactors; a sealing element disposed at a second end of each of the plurality of reactors, wherein the sealing element is configured to form a sealing contact with a surface of a substrate; and a dissolution rate monitor extending into each of the plurality of reactors, wherein the dissolution rate monitor is operable to monitor a rate of real-time dissolution of one or more layers on the surface of the substrate when disposed near the surface of the substrate.