发明名称 |
METHOD OF MANUFACTURING MIRROR SHELLS OF A NESTED SHELLS GRAZING INCIDENCE MIRROR |
摘要 |
The present invention relates to a method of manufacturing mirror shells of a nested shells grazing incidence mirror, in particular for EUV radiation and/or X-rays. In the method a blank of a bulk material is provided and machined to form a mirror body of the shell. Mechanical structures are integrated and/or attached to the mirror body during and/or after the machining step. The mechanical structures are required for mounting and/or operating the mirror shells. After these steps the optical surface is formed on the mirror body by diamond turning. The proposed method allows the manufacturing of mirror shells of a nested shells grazing incidence mirror at low costs with high optical quality which may also be refurbished one or several times. |
申请公布号 |
US2014173875(A1) |
申请公布日期 |
2014.06.26 |
申请号 |
US201314107118 |
申请日期 |
2013.12.16 |
申请人 |
USHIO DENKI KABUSHIKI KAISHA |
发明人 |
METZMACHER CHRISTOF;SCHUERMANN MAX CHRISTIAN |
分类号 |
B23P13/00 |
主分类号 |
B23P13/00 |
代理机构 |
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代理人 |
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主权项 |
1. A method of manufacturing mirror shells of a nested shells grazing incidence mirror, in particular for EUV radiation and/or X-rays, the method at least comprising the steps of
providing and machining a blank of a bulk material to form a mirror body of the shell, integrating and/or attaching mechanical structures in and/or to the mirror body during and/or after said step of machining the blank, and forming an optical surface on the mirror body including said mechanical structures by diamond turning. |
地址 |
TOKYO JP |