发明名称 FORMULATIONS OF SOLUTIONS AND PROCESSES FOR FORMING A SUBSTRATE INCLUDING AN ARSENIC DOPANT
摘要 Formulations of solutions and processes are described to form a substrate including a dopant. In particular implementations, the dopant may include arsenic (As). In an embodiment, a dopant solution is provided that includes a solvent and a dopant. In a particular embodiment, the dopant solution may have a flashpoint that is at least approximately equal to a minimum temperature capable of causing atoms at a surface of the substrate to attach to an arsenic-containing compound of the dopant solution. In one embodiment, a number of silicon atoms at a surface of the substrate are covalently bonded to the arsenic-containing compound.
申请公布号 WO2014071352(A3) 申请公布日期 2014.06.26
申请号 WO2013US68426 申请日期 2013.11.05
申请人 DYNALOY, LLC 发明人 HOCHSTETLER, SPENCER, ERICH;POLLARD, KIMBERLY, DONA;MOODY, LESLIE, SHANE;MACKENZIE, PETER, BORDEN;LIU, JUNJIA
分类号 H01L21/228 主分类号 H01L21/228
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