| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing pad which hardly causes a scratch on a surface of a polishing object.SOLUTION: A polishing pad comprises a polishing layer comprising a polishing region and a light transmission region. The light transmission region comprises; a surface layer located on a surface side of the pad; and at least one soft layer laminated under the surface layer. The soft layer has lower degree of hardness than that of the surface layer. |
