| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate housing container which can smoothly push up a substrate, appropriately lower the substrate, and suppress increase in a load applied to a lid.SOLUTION: A substrate housing container includes a container body for housing a semiconductor wafer W, a lid for opening and closing a front surface opened in the container body and a pair of support pieces for supporting the semiconductor wafer W arranged on inner surfaces of both side walls of the container body, and lifts the semiconductor wafer W from the support pieces when the lid is press-fitted to the container body. On the rear sides of the inner surfaces of both side walls of the container body, support grooves 40 for supporting the lifted semiconductor wafer W are arranged. A slope surface 43 on the lower side of the support groove 40 consists of a first gloss region 44 coming into contact with a peripheral side part of the lifted semiconductor wafer W first, a matte region 45 coming into slide contact with the peripheral side part of the semiconductor wafer W having passed the first gloss region 44, and a second gloss region 46 coming into slide contact with the peripheral side part of the semiconductor wafer W having passed the matte region 45. |
