| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature sensor which allows for temperature measurement even under high temperature environment, while ensuring high bond strength of a pattern electrode and a lead frame, and to provide a manufacturing method therefor and a connection method of a lead frame.SOLUTION: A temperature sensor includes an insulating film 2, a thin film thermistor 3 patterned of a thermistor material on the surface of the insulating film, a pair of interdigital electrodes 4 formed on the thin film thermistor so as to face each other while having a plurality of combs, a pair of pattern electrodes 5 connected with the pair of interdigital electrodes and formed on the surface of the insulating film, and a pair of lead frames 6 arranged on the back of the insulating film on the opposite side of the pair of pattern electrodes, and connected therewith through a via hole H formed in the insulating film. The pair of lead frames are welded to a metal material M filling the via hole. |
