| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a liquid draining device and a liquid draining method for a semiconductor device, capable of preventing droplets from being scattered to the outside of the device.SOLUTION: A liquid draining device 20 comprises a fixed base 9, an air nozzle 3 for a casing, an air nozzle 4 for casing recess formation, a vertically movable cylinder 8, and an outer box 2 covering these components. A casing 1 is fixed to the fixed base 9, and liquid draining of the casing 1 is performed by the air nozzle 3 for the casing and the air nozzle 4 for casing recess formation. The air nozzle 3 for the casing and the air nozzle 4 for casing recess formation are fixed to a nozzle pedestal 7 and can be vertically moved by the vertically movable cylinder 8. Thus, in the state where air is jetted out, the air nozzle 3 for the casing and the air nozzle 4 for casing recess formation are slid while keeping an air jetting direction.</p> |
