| 摘要 |
PROBLEM TO BE SOLVED: To provide a component inspection device that inspects electronic components exposed under a low-temperature environment with an actuator on which frost is hardly formed.SOLUTION: An arm 50 that carries an electronic component D from a cooling section 21 to an inspection section 22 is located in an inspection chamber 2 set under a low-temperature environment. An actuator 6 that drives the arm 50 is located outside of the inspection chamber 2 in such a manner that a shaft 70 extends to the outside of the inspection chamber 2 and the actuator 6 transmits a driving force to the arm 50 through the shaft 70. The driving force of the actuator 6 is transmitted to the arm 50 inside the inspection chamber 2 through the shaft 70, which causes the arm 50 to hold the electronic component D and take the electronic component D to the cooling section 21 and the inspection section 22. |
