发明名称 NANOELECTRONIC STRUCTURE AND METHOD OF PRODUCING SUCH
摘要 The present invention relates to semiconductor devices comprising semiconductor nanoelements. In particular the invention relates to devices having a volume element having a larger diameter than the nanoelement arranged in epitaxial connection to the nanoelement. The volume element is being doped in order to provide a high charge carrier injection into the nanoelement and a low access resistance in an electrical connection. The nanoelement may be upstanding from a semiconductor substrate. A concentric layer of low resistivity material forms on the volume element forms a contact.
申请公布号 US2014179087(A1) 申请公布日期 2014.06.26
申请号 US201313886478 申请日期 2013.05.03
申请人 QuNano AB 发明人 Samuelson Lars Ivar;Svensson Patrik;Ohlsson Jonas;Lowgren Truls
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
主权项
地址 US