APPARATUS AND METHODS OF MIXING AND DEPOSITING THIN FILM PHOTOVOLTAIC COMPOSITIONS

摘要

Improved methods and apparatus for forming thin-film layers of semiconductor material absorber layers on a substrate web. According to the present teachings, a semiconductor layer may be formed in a multi-zone process whereby various layers are deposited sequentially onto a moving substrate web. At least one layer is deposited from a mixed gallium indium source.

主权项

1. A vapor deposition apparatus for use in manufacturing thin-film photovoltaic semiconductors, comprising:
a roll-to-roll assembly configured to transport a flexible substrate through plural zones along a processing path; at least one zone having a substantially enclosed gallium and indium deposition assembly configured to deposit a layer comprised of gallium and indium in the presence of selenium gas onto the substrate; and a crucible containing pre-mixed gallium and indium in a predetermined ratio; wherein the gallium and indium deposition assembly is configured to deposit gallium and indium evaporated from the crucible.