发明名称 |
MECHANICAL RESONATOR SENSOR |
摘要 |
<p>A transducer is disclosed for detecting a property of a fluid such as pressure, using a mechanical resonator having a resonant frequency dependent upon the fluid property. The transducer also has a temperature sensing optical cavity with an optical path difference which varies in correspondence with changes in temperature of the transducer.</p> |
申请公布号 |
WO2014096784(A1) |
申请公布日期 |
2014.06.26 |
申请号 |
WO2013GB53274 |
申请日期 |
2013.12.12 |
申请人 |
OXSENSIS LTD |
发明人 |
PECHSTEDT, RALF-DIETER;LANGTON, CONRAD;MOVSOVIC, KONSTANTIN |
分类号 |
G01L9/00 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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